Optical beam steering devices and sensor systems including the same

ABSTRACT

An optical beam steering device may include a tunable laser diode configured to emit laser beams and an antenna that includes a grating structure and is configured to convert the laser beams to a linear light source based on the grating structure. The tunable laser diode may emit a first laser beam having a first wavelength, and emit a second laser beam having a second wavelength, the second wavelength different from the first wavelength. The antenna may receive the first laser beam and, in response, output a first linear light source having a first emission angle with a surface of the antenna. The antenna may further receive the second laser beam and, in response, output a second linear light source having a second emission angle with the surface of the antenna, the second emission angle different from the first angle.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit under 35 U.S.C. § 119 of KoreanPatent Application No. 10-2018-0008838, filed on Jan. 24, 2018 in theKorean Intellectual Property Office, the disclosure of which isincorporated herein in its entirety by reference.

BACKGROUND 1. Field of the Disclosure

The present disclosure relates to optical beam steering devices andsensor systems including the same.

2. Description of the Related Art

A LIDAR (light detection and ranging) system is a system that can obtaininformation associated with a target in an external environment,including a distance from the LIDAR system to the target, by emitting apulsed laser beam toward the target and by sensing the energy reflectedfrom the target (e.g., by detecting a reflection of the pulsed laserbeam from a surface of the target). In some cases, an obstacle detectionsensor or the like of an autonomous vehicle may include a LIDAR system.

A LIDAR system may include an optical beam steering device which maysteer a pulsed laser beam emitted by the LIDAR system with respect tothe target at a desired angle. As a result of recent tendencies towardminiaturization of integrated circuits, it is desirable to simplify theconfiguration of the optical beam steering device and downsize the LIDARsystem.

SUMMARY

Some example embodiments of the present disclosure provide optical beamsteering devices having a simple configuration.

Some example embodiments of the present disclosure provide sensorsystems including optical beam steering devices having a simpleconfiguration.

The example embodiments of the present disclosure are not limited tothose mentioned above and some example embodiments which have not beenmentioned can be clearly understood by those skilled in the art from thedescription below.

According to some example embodiments of the present disclosure, anoptical beam steering device may include a tunable laser diodeconfigured to emit laser beams and an antenna including a gratingstructure and configured to convert the laser beams emitted by thetunable laser diode to a linear light source based on the gratingstructure. The tunable laser diode, to emit the laser beams, may emit afirst laser beam having a first wavelength and may further emit a secondlaser beam having a second wavelength, the second wavelength differentfrom the first wavelength. The antenna, to convert the laser beamsemitted by the tunable laser diode to a linear light source based on thegrating structure, may receive the first laser beam and, in response,output a first linear light source having a first emission angle with asurface of the antenna and may further receive the second laser beamand, in response, output a second linear light source having a secondemission angle with the surface of the antenna, the second emissionangle different from the first emission angle.

According to some example embodiments of the present disclosure, anoptical beam steering device may include a tunable laser diodeconfigured to emit laser beams, first and second optical amplifiers,first and second bandpass filters, a first antenna extending in a firstdirection, and a second antenna extending in a second direction. Thesecond direction may be substantially orthogonal to the first direction.The tunable laser diode, to emit the laser beams, may emit a first laserbeam having a first wavelength and may further emitting a second laserbeam having a second wavelength, the second wavelength different fromthe first wavelength. The first and second optical amplifiers may beconfigured to amplify the first and second laser beams emitted by thetunable laser diode, respectively. The first and second bandpass filtersmay be configured to filter the first and second laser beams amplifiedby the first and second optical amplifiers, respectively. The firstantenna may be configured to convert the filtered first laser beam to alinear light source extending in the second direction, such that thelinear light source extending in the second direction has a firstemission angle with a surface of the first antenna. The second antennamay be configured to convert the filtered second laser beam to a linearlight source extending in the first direction, such that the linearlight source extending in the first direction has a second emissionangle with a surface of the second antenna, the second emission angledifferent from the first emission angle.

According to some example embodiments of the present disclosure, anoptical beam steering device may include a tunable laser diodeconfigured to emit a laser beam, a first antenna including a pluralityof first gratings spaced apart from each other by a first distance, anda second antenna including a plurality of second gratings spaced apartfrom each other by a second distance different from the first distance.The first antenna may be configured to convert the laser beam to alinear light source having a first emission angle with a surface of thefirst antenna through the plurality of first gratings. The secondantenna may be configured to convert the laser beam to a linear lightsource having a second emission angle with a surface of the secondantenna through the plurality of second gratings.

According to some example embodiments of the present disclosure, asensor system may include an optical beam steering device configured toirradiate a target with an output light; and an optical receiverconfigured to receive a light of the output light reflected from thetarget. The optical beam steering device may include a tunable laserdiode configured to emit laser beams. The emitting may include emittinga first laser beam having a first wavelength and emitting a second laserbeam having a second wavelength, the second wavelength different fromthe first wavelength. The optical beam steering device may furtherinclude an antenna including a grating structure. The antenna may beconfigured to convert the laser beams emitted by the tunable laser diodeto a linear light source based on the grating structure. The convertingmay include receiving the first laser beam and, in response, outputtinga first linear light source having a first emission angle with a surfaceof the antenna, and receiving the second laser beam and, in response,outputting a second linear light source having a second emission anglewith the surface of the antenna, the second emission angle differentfrom the first emission angle.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other aspects and features of the present disclosure willbecome more apparent by describing in detail example embodiments thereofwith reference to the attached drawings, in which:

FIG. 1 is a block diagram of an optical beam steering device accordingto some example embodiments of the present disclosure;

FIG. 2 is a conceptual diagram for explaining an antenna included in theoptical beam steering device of FIG. 1;

FIG. 3 is a perspective view for explaining the operation of the opticalbeam steering device of FIG. 1;

FIG. 4 is a graph for explaining the operation of the optical beamsteering device of FIG. 1;

FIG. 5 is a block diagram of the optical beam steering device accordingto some example embodiments of the present disclosure;

FIGS. 6A, 6B, and 6C are cross-sectional views for explaining theantenna included in the optical beam steering device of FIG. 5;

FIGS. 7A and 7B are conceptual diagrams for explaining the operation ofthe optical beam steering device of FIG. 5;

FIG. 8 is a block diagram of the optical beam steering device accordingto some example embodiments of the present disclosure;

FIG. 9 is a block diagram of a sensor system including the optical beamsteering device according to some example embodiments of the presentdisclosure; and

FIG. 10 is an example semiconductor system to which the optical beamsteering device and the sensor system according to some exampleembodiments of the present disclosure can be applied.

DETAILED DESCRIPTION OF THE EMBODIMENTS

FIG. 1 is a block diagram of an optical beam steering device accordingto some example embodiments of the present disclosure.

Referring to FIG. 1, an optical beam steering device 100 according tosome example embodiments of the present disclosure may include a tunablelaser diode 110, an optical amplifier 120, a bandpass filter 130, and anantenna 140.

The tunable laser diode 110 may be configured to emit (e.g., output) alaser beam. The tunable laser diode 110 may mean a laser diode that canchange the oscillation frequency via drive current or drive frequencycontrol. The tunable laser diode 110 may vary the wavelength band oflaser emitted through a change in oscillation frequency.

For example, the tunable laser diode 110 may emit (e.g., output) a laserbeam of a first wavelength (e.g., a first laser beam) under (e.g., inresponse to) a first condition, and may emit a laser beam of a secondwavelength (e.g., second laser beam) under (e.g., in response to) asecond condition. The first condition and the second condition may bedifferent from each other, and the first wavelength and the secondwavelength may be different from each other. The laser beams ofdifferent wavelengths generated by the tunable laser diode 110 will bedescribed later in more detail.

Although not illustrated in FIG. 1, the optical beam steering device 100may further include a driving driver capable of changing the outputwavelength or the oscillation wavelength by applying current orfrequency to the tunable laser diode 110.

Laser beam generated from the tunable laser diode 110 may be provided tothe optical amplifier 120 through a waveguide 111.

The optical amplifier 120 may amplify the laser beam provided from thetunable laser diode 110 through the waveguide 111. Restated, the opticalamplifier 120 may be configured to amplify light (e.g., a laser beam)emitted by the tunable laser diode 110. Specifically, the opticalamplifier 120 receives a current from an external power supply and maygenerate the amplified laser beam, using the energy of the providedcurrent.

The optical signal amplified from the optical amplifier 120 may beprovided to the bandpass filter 130 through the waveguide 121.

The bandpass filter 130 receives the laser beam provided from theoptical amplifier 120 through the waveguide 121, and may filter theoptical signal for the provided laser beam other than band to be used bythe optical beam steering device 100. Noise may be removed from theoptical signal that has passed through the bandpass filter 130. Thefiltered optical signal may be provided to the antenna 140 through thewaveguide 131. Restated, the bandpass filter 130 may be configured tofilter light amplified by the optical amplifier 120 and may be furtherconfigured to provide the filtered light to the antenna 140.

The antenna 140 may emit the provided optical signal toward the target.The antenna 140 may emit the laser beam to the target in the form of alinear light source. Restated, the antenna 140 may convert the laserbeam emitted by the tunable laser diode 110 into a linear light sourcethat is emitted (e.g., output) by the antenna 140. The antenna 140 maybe disposed, for example, in a vertical or horizontal structure. Whenthe antenna 140 is disposed as a vertical antenna, the laser beamemitted from the antenna 140 may have a form of a horizontal linearlight source. When the antenna 140 is disposed as a horizontal antenna,the laser beam emitted from the antenna 140 may have a form of avertical linear light source.

However, the arrangement direction of the antenna 140 and the shape ofthe laser beam emitted from the antenna 140 are not limited thereto.That is, the antenna 140 is disposed in an arbitrary first direction,and the laser beam emitted from the antenna 140 may have a form of alinear light source extending in a second direction perpendicular to thefirst direction.

The antenna 140 may include a plurality of gratings therein.Specifically, the antenna 140 may include a plurality of gratings spacedapart from each other at a constant cycle. The plurality of gratings maybe referred to herein as a grating structure.

FIG. 2 is a conceptual diagram for explaining an antenna included in theoptical beam steering device of FIG. 1.

Referring to FIG. 2, the antenna 140 may include a substrate 141, and agrating structure (e.g., the plurality of gratings 142) formed on thesubstrate 141. The substrate 141 may include, for example, a siliconsubstrate, but the present disclosure is not limited thereto. Thesubstrate 141 may be a silicon-on-insulator (SOI).

The tunable laser diode 110, the optical amplifier 120, the bandpassfilter 130 and the antenna 140 included in the optical beam steeringdevice 100 of FIG. 1 may be disposed on the same substrate. That is, insome example embodiments of the present disclosure, the optical beamsteering device 100 may include a structure in which the tunable laserdiode 110, the optical amplifier 120, the bandpass filter 130 and theantenna 140 are formed on the substrate 141 of the antenna 140, but thepresent disclosure is not limited thereto.

The antenna 140 may include a plurality of gratings 142 separated fromeach other at a constant distance P. The plurality of gratings 142 maybe referred to herein as a grating structure. As shown in FIG. 2, alaser beam emitted by the tunable laser diode 110 may pass from thesubstrate 141 towards and through the gratings 142 of the gratingstructure, for example when the tunable laser diode 110 is included inthe substrate 141, when the substrate 141 is between the tunable laserdiode 110 and the gratings 142, some combination thereof, or the like.As shown in FIG. 2, a laser beam Li emitted by the tunable laser diode110 that passes through the gratings 142 is converted to a laser beamLi′ (e.g., a light beam that is output by the antenna 140) that has anemission angle a°. For example, as shown in FIG. 2, the laser beam Limay enter the gratings 142 at an angle that is perpendicular orsubstantially perpendicular (e.g., perpendicularly within manufacturingtolerances and/or material tolerances) in relation to the antenna 140,and the laser beam Li′ that is emitted (e.g., output) by the antenna 140may be a linear light source and may have an emission angle a° (alsoreferred to herein as simply an “angle”) that is different fromperpendicular or substantially perpendicular to the antenna 140. In thelaser beam Li′ emitted from the antenna 140, an emission angle a° of thelaser beam Li′ may be determined by a distance P between the gratings142, and the wavelength of beam Li generated (e.g., emitted) from thetunable laser diode 110. The grating 142 may include, for example, adielectric grating, but the present disclosure is not limited thereto.

Hereinafter, the operation of the optical beam steering device 100 usingthe antenna 140 will be described in more detail with reference to FIG.3.

FIG. 3 is a perspective view for explaining the operation of the opticalbeam steering device of FIG. 1.

Referring to FIG. 3, emission of first light L1 and second light L2 fromthe antenna 140 is illustrated. The antenna 140 shown in FIG. 3 includesa grating structure including a plurality of gratings 142 as describedabove with reference to FIG. 2. As shown in FIG. 3, a first laser beamLi1 having a first wavelength and a second laser beam Li2 having asecond, different wavelength may be received at the antenna 140 from atunable laser diode. The antenna 140 may convert the first laser beamLi1 into the first light L1 (e.g., first light beam L1) and may convertthe second laser beam Li2 into the second light L2 (e.g., second lightbeam L2) based on the first laser beam and second laser beam Li2 passingthrough the antenna 140 towards the gratings (e.g., grating structure)of the antenna 140 and being emitted from the antenna 140 through saidgratings, respectively. As described above, the first light L1 and thesecond light L2 emitted from the antenna 140 may take the form of alinear light source. Thus, the antenna 140 is configured to convert alaser beam emitted by the tunable laser diode 110 to a linear lightsource based on a grating structure of the antenna 140.

For example, when the antenna 140 is disposed as the vertical antenna,both the first light L1 and the second light L2 may be a horizontallinear light source. In some example embodiments, when the antenna 140is disposed as the horizontal antenna, both the first light L1 and thesecond light L2 may be a vertical linear light source.

The first light L1 and the second light L2 may have different anglesemitted from the antenna 140 (e.g., different emission angles). Here,the “angle emitted from the antenna 140” means an angle formed between atraveling direction of the first light L1 or the second light L2 and thesurface of the antenna 140 (e.g., an emission angle). That is, takingFIG. 2 as an example, the emission angle at which the laser beam isemitted from the antenna 140 may be a°.

In FIG. 3, an angle at which the first light L1 is emitted from theantenna 140 may be a1°, and an angle at which the second light L2 isemitted from the antenna 140 may be a2°. Restated, and as shown in FIG.3, the antenna 140 may receive the first laser beam Li1 at one surfaceand may, in response, output a first linear light source (e.g., thefirst light L1) from an opposite surface of the antenna 140, the firstlinear light source having a first emission angle (e.g., a1°) with theopposite surface of the antenna, and the antenna 140 may receive thesecond laser beam Li2 at the one surface and may, in response, output asecond linear light source (e.g., L2) having a second emission angle(e.g., a2°) with the opposite surface of the antenna 140, where thesecond emission angle (e.g., a2°) is different from the first emissionangle (e.g., a1°). The first light L1 illustrated in FIG. 3 is lightthat forms a minimum angle a1° with the surface of the antenna 140 amongthe laser beam that can be emitted from the antenna 140. In addition,the second light L2 is light that makes a maximum angle a2° with thesurface of the antenna 140 among the laser beam that can be emitted fromthe antenna 140.

Thus, the antenna 140 may emit laser beam forming an angle (e.g.,emission angle) between a1° and a2° with its surface. In order tocontrol the angle formed between the laser beam emitted from the antenna140 and the surface of the antenna 140 (e.g., control the emissionangle), the wavelength of the laser beam generated (e.g., emitted) fromthe tunable laser diode 110 may be controlled. This will be explained inmore detail with reference to FIG. 4.

FIG. 4 is a graph for explaining the operation of the optical beamsteering device 100 of FIG. 1.

Referring to FIG. 4, a graph in which the tunable laser diode 110generates light of a first wavelength λ1 at a first time t1 andgenerates light of a second wavelength λ2 at a second time t2 isillustrated. As illustrated in FIG. 4, the tunable laser diode 110generates the laser beam of the first wavelength λ1 at the first timet1, and then continuously increases the wavelength of the generatedlight, thereby generating the laser beam of the second wavelength λ2 atthe second time t2.

The case where the tunable laser diode 110 generates the laser beam ofthe first wavelength λ1 may be generation of laser beam under the firstcondition. Specifically, the tunable laser diode 110, for example, isprovided with a power supply having current or frequency of a firstmagnitude from a drive driver (not illustrated) connected thereto,thereby generating the laser beam of the first wavelength λ1.

In some example embodiments, the case where the tunable laser diode 110generates the laser beam of the second wavelength λ2 may be generationof laser beam under the second condition. Specifically, the tunablelaser diode 110, for example, is provided with a power supply havingcurrent or frequency of a second magnitude from a drive driver (notillustrated) connected thereto, thereby generating the laser beam of thesecond wavelength λ2.

According to the graph of FIG. 4, the case where the wavelength of thelight generated by the tunable laser diode 110 is linearly increasedfrom the first wavelength λ1 of the first time t1 to the secondwavelength λ2 of the second time t2 is illustrated. However, the presentdisclosure is not limited thereto. The graph of FIG. 4 is an example,and the tunable laser diode 110 may nonlinearly change the wavelength ofthe laser beam generated between the first time t1 and the second timet2.

The first light L1 is emitted at the first angle a1° with the surface ofthe antenna 140 by the laser beam generated at the first wavelength λ1.In addition, the second light L2 is emitted at the second angle a2° withthe surface of the antenna 140 by the laser beam generated at the secondwavelength λ2. Therefore, the laser beam emitted from the antenna 140can change from the first light L1 forming the first angle a1° with theantenna 140 to the second light L2 forming the second angle a2, by thelaser beam in which the wavelength changes from the first wavelength λ1to the second wavelength λ2.

Likewise, the graph of FIG. 4 illustrates that the angle formed betweenthe light emitted from the antenna 140 and the antenna 140 linearlyincreases from the first angle a1° of the first time t1 to the secondangle a2° of the second time t2, but the present disclosure is notlimited thereto. The graph of FIG. 4 is an example, and the angle formedbetween the laser beam emitted between the first time t1 and the secondtime t2 with respect to the antenna 140 may also change nonlinearly.

In summary, the optical beam steering device 100 according to someexample embodiments of the present disclosure may control the emissionangle of the laser beam to be emitted from the antenna 140, using thechange in the wavelength of the laser beam generated from the tunablelaser diode 110.

That is, in the optical beam steering device 100, the tunable laserdiode 110 generates the laser beam of the first wavelength λ1 andprovides the first laser beam (e.g., Li1) to the antenna 140, and theantenna 140 receives the first laser beam of the first wavelength λ1(e.g., Li1) and may, in response, emit first light L1 forming a firstangle a1° with the surface of the antenna 140.

Subsequently, the optical beam steering device 100 generates secondlaser beam (e.g., Li2) of the second wavelength λ2 different from thefirst wavelength λ1, and the antenna 140 may receive the second laserbeam (e.g., Li2) of the second wavelength λ2 and may, in response emitthe second light L2 forming the second angle a2° with the surface of theantenna 140.

Restated, the tunable laser diode 110 may be configured to continuouslychange wavelength of the laser beams output thereby between the firstwavelength λ1 and the second wavelength λ2, such that the tunable laserdiode 110 is configured to continuously change between emitting thefirst laser beam Li1 and emitting the second laser beam Li2; and theantenna 140 may be configured to continuously change emission angles ofthe linear light source between the first emission angle a1° and thesecond emission angle a2°. As a result, the antenna 140 may beconfigured to “scan” a target within a range between the first emissionangle a1° and the second emission angle a2° based on adjusting thelinear light source output from the antenna 140, and thus output fromthe optical beam steering device 100, from having a emission angle a1°and having a second emission angle a2°.

The optical beam steering device 100 may irradiate a laser beam formingan angle in the range of a2°-a1° with the surface of the antenna 140through the above-described control of the laser beam. The optical beamsteering device 100 emits a linear light source, that is, laser beam ofone-dimensional form through the antenna 140.

Incidentally, as described above, by changing the wavelength of thelaser beam generated by the tunable laser diode 110, the angle formedbetween the laser beam emitted from the antenna 140 and the surface ofthe antenna 140 may change. Therefore, the region irradiated with thelaser beam of one-dimensional form emitted through the antenna 140 ismoved, and it is possible to obtain the same effect as the case wherethe linear light source sequentially passes through the two-dimensionalregion, thereby improving performance of the optical beam steeringdevice 100 by enabling scanning of a target with a linear light sourceby adjusting the wavelength of the laser beam emitted by the tunablelaser diode 110 to cause the linear light source to scan betweendifferent emission angles. The optical beam steering device 100 mayfurther have improved compactness as a result of including at least thetunable laser diode 110 and antenna 140 as described herein.

When the angle of the laser beam emitted from the antenna 140 with thesurface of the antenna 140 changes from a1° to a2°, the laser beamemitted from the antenna 140 may move in the same direction as theextension direction of the antenna 140. That is, in the case where theantenna 140 is a vertical antenna, the light emitted from the antenna140 is a horizontal linear light source, and the laser beam emitted fromthe antenna 140 through the optical beam steering process may move inthe vertical direction.

In some example embodiments, when the antenna 140 is a horizontalantenna, the laser beam emitted from the antenna 140 is a verticallinear light source, and the laser beam emitted from the antenna 140 bythe optical beam steering process may move in the horizontal direction.

However, the present disclosure is not limited thereto, and when theantenna 140 is disposed in an arbitrary first direction (e.g., a surfaceof the antenna 140 from which a laser beam is output extends in anarbitrary first direction), and the laser beam emitted from the antenna140 is linear light source extending in a second direction orthogonal orsubstantially orthogonal (e.g., orthogonal within manufacturingtolerances and/or material tolerances) to the first direction, the laserbeam may move in an arbitrary first direction by the optical steering ofthe optical beam steering device 100. Accordingly, at least the tunablelaser diode 110 and the antenna 140 may be collectively configured tooutput a linear light source and cause the linear light source to movebetween the first emission angle a1° and the second emission angle a2°along the arbitrary first direction. When the antenna 140 is ahorizontal antenna, the first direction may be a horizontal directionand the second direction may be a vertical direction.

In summary, the optical beam steering device 100 according to someexample embodiments of the present disclosure has a configuration fortwo-dimensionally irradiating the target with a laser beam, and includesa relatively simple system including the tunable laser diode 110, theoptical amplifier 120, the bandpass filter 130 and then antenna 140.Such a system may thus have improved compactness and/or operationalreliability. While laser beam having a wavelength changed by the tunablelaser diode 110 is emitted by the antenna 140, and two-dimensional laserbeam irradiation of the target can be performed, using theone-dimensional light.

FIG. 5 is a block diagram of the optical beam steering device accordingto some example embodiments of the present disclosure.

Referring to FIG. 5, an optical beam steering device 200 according tosome example embodiments of the present disclosure includes a tunablelaser diode 110, first to n-th optical amplifiers (120_1 to 120_n),first to n-th bandpass filters (130_1 to 130_n), and first to n-thantennas (140_1 to 140_n). Here, n means a natural number of 2 or more.

The tunable laser diode 110 is the same as the tunable laser diode 110described with reference to FIG. 1. Therefore, the tunable laser diode110 changes the wavelength of the laser beam through the change of theoscillation frequency, and may provide the generated laser beam to thefirst to n-th optical amplifiers (120_1 to 120_n) through the waveguide111.

The first to n-th optical amplifiers (120_1 to 120_n) may amplify thelaser beam provided from the tunable laser diode 110 through thewaveguide 111. The first to n-th optical amplifiers (120_1 to 120_n) areprovided with the current from an external power supply, and maygenerate the amplified laser beam, using the energy of the providedcurrent. Although the first to n-th optical amplifiers (120_1 to 120_n)may amplify the laser beam provided from the tunable laser diode 110with the same gain, the present disclosure is limited to thereto. Thefirst to n-th optical amplifiers (120_1 to 120_n) may amplify the laserbeam provided from the tunable laser diode 110 with different gains fromeach other.

The optical signals amplified from the first to n-th optical amplifiers(120_1 to 120_n) may be provided to the first to n-th bandpass filters(130_1 to 130_n) through the waveguides (121_1 to 121_n). The opticalsignals filtered by the first to n-th bandpass filters (130_1 to 130_n)may be provided to the first to n-th antennas (140_1 to 140_n) throughthe waveguides (131_1 to 131_n).

The first to n-th bandpass filters (130_1 to 130_n) are provided withthe laser beam provided from the optical amplifiers (120_1 to 120_n)through the waveguides (121_1 to 121_n), and may filter optical signalsof the laser beam other than the band to be used by the optical beamsteering device 100. Noise can be removed from the optical signal thathas passed through the bandpass filters (130_1 to 130_n). The filteredoptical signal may be provided to the antennas (140_1 to 140_n) throughthe waveguides (130_1 to 130_n).

Restating what is shown in FIG. 5, the optical beam steering device 200may include, in addition to a tunable laser diode 110 configured to emitfirst and second laser beams having different, first and secondwavelengths, respectively, first and second optical amplifiers (e.g.,120_1 and 120_2) configured to amplify the first and second laser beamsemitted by the tunable laser diode 110, respectively, first and secondbandpass filters (e.g., 130_1 and 130_2) configured to filter the firstand second laser beams amplified by the optical amplifier, respectively(e.g., via 121_1 and 121_2, respectively), and first and second antennas(e.g., 140_1 and 140_2) configured to convert the filtered first andsecond laser beams to separate linear light sources, respectively.

In some example embodiments, the optical amplifiers 120_1 to 120_n andthe bandpass filters 130_1 to 130_n may be omitted from the optical beamsteering device 200, such that the optical beam steering device 200according to some example embodiments of the present disclosure includesa tunable laser diode 110 and first to n-th antennas (140_1 to 140_n).

In some example embodiments, the optical beam steering device 200includes a single optical amplifier 120 configured to amplify laserbeams emitted by the tunable laser diode 110, such that multiplebandpass filters (e.g., 130_1 and 130_2) are configured to filter thelaser beams amplified by the optical amplifier 120 and provide thefiltered laser beams to separate, respective antennas (e.g., 140_1 and140_2, respectively).

In some example embodiments, the optical beam steering device 200includes a single optical amplifier 120 and a single bandpass filter 130where the bandpass filter is configured to filter the laser beamsamplified by the optical amplifier 120 and provide the filtered laserbeams to separate, respective antennas (e.g., 140_1 and 140_2,respectively).

Each of the configurations of the first to n-th antennas (140_1 to140_n) may be different from that of the antenna 140 included in someexample embodiments, including the example embodiments described above.This will be described in more detail with reference to FIGS. 6A to 6C.

FIGS. 6A, 6B, and 6C are cross-sectional views for explaining theantenna included in the optical beam steering device of FIG. 5.

First, referring to FIG. 6A, the first antenna 140_1 may include asubstrate 141_1, and a plurality of gratings 142_1 formed on thesubstrate 141_1. Since the substrate 141_1 and the grating 142_1 are thesame as the substrate 141 and the grating 142 described with referenceto FIG. 2, the description thereof will not be provided.

The plurality of gratings 142_1 may be separated from each other by afirst distance P1. An emission angle a1° of the laser beam Li′ outputbased on receipt of laser beam Li at the plurality of gratings 142_1 maybe determined by (e.g., based on) the distance P1 between the gratings142_1 and the wavelength of the beam generated from the tunable laserdiode 110.

Subsequently, referring to FIG. 6B, the second antenna 140_2 may includea substrate 141_2, and a plurality of gratings 142_2 formed on thesubstrate 141_2. The plurality of gratings 142_2 may be separated fromeach other by a second distance P2. The second distance P2 between theplurality of gratings 142_2 may be different from the first distance P1between the gratings 142_1.

The emission angle a2° of the laser beam Li′ output based on receipt oflaser beam Li at the plurality of gratings 142_2 may be determined by(e.g., based on) the distance P2 between the gratings 142_2 and thewavelength of the beam generated from the tunable laser diode 110. Sincethe second distance P2 and the first distance P1 are different from eachother, the angle a2° formed between the laser beam emitted from thesecond antenna 140_2 and the surface of the second antenna 140_2 may bedifferent from the angle a1° formed between the laser beam emitted fromthe first antenna 140_1 and the surface of the first antenna 140_1.

Referring also to FIG. 6C, the n-th antenna 140_n may include asubstrate 141_n, and a plurality of gratings 142_n formed on thesubstrate 141_n. The plurality of gratings 142_n may be separated fromeach other by a n-th distance Pn. The n-th distance Pn between theplurality of gratings 142_1 may be different from the first distance P1between the gratings 142_1.

The emission angle an° of the laser beam Li′ output based on receipt oflaser beam Li at the plurality of gratings 142_n may be determined by(e.g., based on) the distance Pn between the gratings 142_n and thewavelength of the beam generated from the tunable laser diode 110. Sincethe n-th distance Pn and the first distance P1 are different from eachother, an angle an° formed between the laser beam emitted from the n-thantenna 140_n and the surface of the n-th antenna 140_1 may be differentfrom the angle a1° formed between the laser beam emitted from the firstantenna 140_1 and the surface of the first antenna 140_1.

In some example embodiments of the present disclosure, the first to n-thantennas (140_1 to 140_n) may be antennas disposed in the samedirection. That is, when the first antenna 140_1 is disposed in thevertical direction, the second to n-th antennas (140_2 to 140_n) mayalso be disposed in the vertical direction. In this case, all the laserbeams emitted from the first to n-th antennas (140_1 to 140_n) may havethe form of horizontal linear light sources.

However, the present disclosure is not limited thereto, and the first ton-th antennas (140_1 to 140_n) may be disposed in an arbitrary firstdirection, and laser beams emitted from the first to n-th antennas(140_1 to 140_n) may be in the form of a linear light source extendingin a second direction orthogonal or substantially orthogonal to thefirst direction. When an antenna 140 is a horizontal antenna, the firstdirection may be a horizontal direction and the second direction may bea vertical direction. For example, a first antenna 140_1 may extend in afirst direction and may be configured to convert filtered first laserbeams to a linear light source extending in a second direction that issubstantially orthogonal to the first direction, and a second antenna140_2 may extend in the second direction and may be configured toconvert filtered second laser beams to a linear light source extendingin the first direction. The first antenna 140_1 may receive a filteredfirst laser beam and, in response, output a linear light source having afirst emission angle with a surface of the first antenna 140_1, and thesecond antenna 140_2 may receive a filtered second laser beam and, inresponse, output a linear light source having a second emission anglewith a surface of the second antenna 140_2, the second emission angledifferent from the first emission angle.

In some example embodiments, different antennas (e.g., 140_1 and 140_2)may each be configured to separately receive a laser beam having acommon wavelength emitted by the tunable laser diode 110 and may each,separately, convert the laser beam to separate linear light sourceshaving separate emission angles with the surfaces of the respectivedifferent antennas. For example, and with reference to FIGS. 6A-6C,where the tunable laser diode 110 emits a laser beam having a givenwavelength, a first antenna (e.g., 140_1), which includes a firstantenna which includes a plurality of first gratings spaced apart fromeach other by a first distance, may be configured to convert the laserbeam to a linear light source having a first emission angle with asurface of the first antenna through the plurality of first gratings,and a second antenna (e.g., 140_2), the second antenna configured toconvert the laser beam to a linear light source having a second emissionangle with the surface of the second antenna through the plurality ofsecond gratings.

FIGS. 7A and 7B are conceptual diagrams for explaining the operation ofthe optical beam steering device of FIG. 5.

Referring first to FIG. 7A, the first antenna 140_1 is illustrated toemit a laser beam forming an angle between a1° and a2° with its surface.That is, similarly to the operation of the optical beam steering device100 described with reference to FIGS. 3 and 4, when the tunable laserdiode 110 generates the laser beam between the first wavelength λ1 andthe second wavelength λ2, the first antenna 140_1 may emit laser beamhaving an angle of the range of a2°-a1° with the surface of the firstantenna 140_1.

Therefore, the optical beam steering device 200 moves a regionirradiated with the one-dimensional form of the laser beam emittedthrough the first antenna 140_1, and may have the same effect as a casewhere the linear light source sequentially passes through thetwo-dimensional region.

Referring to FIG. 7B, the second antenna 140_2 is illustrated to emitlaser beam forming an angle ak+1° to ak° with its surface. When thetunable laser diode 110 generates laser beam between the firstwavelength λ1 and the second wavelength λ2, the second antenna 140_2 mayemit laser beam forming the angles of the range of ak+1°-ak° with thesurface of the second antenna 140_2.

Therefore, the optical beam steering device 200 moves a regionirradiated with the one-dimensional form of the laser beam emittedthrough the second antenna 140_1, and may have the same effect as a casewhere the linear light source sequentially passes through thetwo-dimensional region.

Restating what is shown in FIGS. 7A and 7B, a tunable laser diode 110may be configured to emit a first laser beam having a first wavelengthand a second laser beam having a second wavelength different from thefirst wavelength, and a given antenna (e.g., a first antenna 140_1) maybe configured to receive the first laser beam (e.g., Li1) and, inresponse, output a linear light source having a first emission angle(e.g., L1) and may be further configured to receive the second laserbeam (e.g., Li2) and, in response, output a linear light source having athird emission angle (e.g., L2), the third emission angle different fromthe first emission angle, and another antenna (e.g., a second antenna140_2) may be configured to receive the first laser beam (e.g., Li1)and, in response, output a linear light source having a second emissionangle (e.g., L3), and may be further configured to receive the secondlaser beam (e.g., Li2) and, in response, output a linear light sourcehaving a fourth emission angle (e.g., L4), the fourth emission angledifferent from the second emission angle.

The tunable laser diode 110 may be configured to continuously change awavelength of the laser beams emitted by the tunable laser diode betweenthe first wavelength and the second wavelength, such that the tunablelaser diode is configured to continuously change between emitting thefirst laser beam (e.g., Li1) and emitting the second laser beam (e.g.,Li2), and the first antenna (e.g., 140_1) may be configured tocontinuously change emission angles of the linear light source output bythe first antenna between the first emission angle (e.g., L1) and thethird emission angle (e.g., L2). In addition, the second antenna (e.g.,140_2) may be configured to continuously change emission angles of thelinear light source output by the second antenna between the secondemission angle (e.g., L3) and the fourth emission angle (e.g., L4).

FIG. 8 is a block diagram of the optical beam steering device accordingto some example embodiments of the present disclosure.

Referring to FIG. 8, an optical beam steering device 300 according tosome example embodiments of the present disclosure may include a tunablelaser diode 110, optical amplifiers (120, 320), bandpass filters (130,330) and antennas (140, 340).

Since the tunable laser diode 110, the optical amplifier 120, and thebandpass filter 130 are the same as the constituent elements of theoptical beam steering device 100 previously described with reference toFIG. 1, detailed description thereof will not be provided.

The optical beam steering device 300 may include a vertical antenna 140.The vertical antenna 140 is a vertically disposed antenna and may emitlaser having the form of horizontal linear light source.

Further, the tunable laser diode 110 may be connected to the opticalamplifier 320 via the waveguide 311. Since the optical amplifier 320 andthe bandpass filter 330 connected to the optical amplifier 320 throughthe waveguide 321 are also the same as the constituent elements of theoptical beam steering device 100 described using FIG. 1, the detaileddescription thereof will not be provided. Additionally, since thebandpass filter 330 and the antenna 340 connected to the bandpass filter330 through the waveguide 331 are also the same as the constituentelements of the optical beam steering device 100 described using FIG. 1,the detailed description thereof will not be provided.

The optical beam steering device 300 may include a horizontal antenna340. The horizontal antenna 340 is disposed in a horizontal direction,and may emit laser having the form of vertical linear light source.

That is, the optical beam steering device 300 according to some exampleembodiments of the present disclosure illustrated in FIG. 8 maysimultaneously include the vertical antenna 140 and the horizontalantenna 340. The optical beam steering device 300 may selectively emitlaser beam to the target through one of the vertical antenna 140 and thehorizontal antenna 340 as needed. Restated, the optical beam steeringdevice 300 may be configured to control at least one of the verticalantenna 140 (e.g., a first antenna) and the horizontal antenna (e.g., asecond antenna) such that the optical beam steering device 300 isconfigured to selectively output a linear light source extending in thesecond direction or a linear light source extending in the firstdirection.

FIG. 9 is a block diagram of a sensor system including the optical beamsteering device according to some example embodiments of the presentdisclosure.

Referring to FIG. 9, a sensor system 1000 according to some exampleembodiments of the present disclosure may include an optical beamsteering device 100, a receiver 500 (also referred to herein as anoptical receiver), and a controller 600.

Since the optical beam steering device 100 is the same as the opticalbeam steering device described above with reference to some exampleembodiments, the description thereof will not be provided. The sensorsystem 1000 may irradiate a target with a laser beam, using the opticalbeam steering device 100. Restated, the optical beam steering device 100may be configured to irradiate a target with an output light.

The receiver 500 may detect (e.g., receive) the laser beam (e.g., outputlight) reflected from the target and may generate an electric signal onthe basis of the detected laser beam. Specifically, the receiver 500 mayinclude a time-to-digital converter (TDC) 510 and a sensor 520.

The receiver 500 may detect the laser beam (e.g., output light)reflected from the target through the sensor 520. The sensor 520 mayinclude, for example, a photodiode array, and may specifically include aplurality of photodiode arrays arranged one-dimensionally ortwo-dimensionally. The sensor 520 may receive the laser beam, convertthe laser beam into an electric signal, and provide the electric signalto the TDC 510. Restated, the sensor 520 may be configured to detectoutput light reflected from a target and to generate an electricalsignal based on the detecting.

The TDC 510 may numerically analyze the electrical signal provided bythe sensor 520. For example, each of the photodiode arrays included inthe sensor 520 has a time difference and numerically analyzes thereceived laser beam signal, thereby converting distance informationbetween the sensor system 1000 and the target into a numerical value.Restated, the TDC 510 may be configured to convert time differenceinformation included in the electrical signal generated by the sensor520 into numerical information.

The controller 600 may control the optical beam steering device 100 andthe receiver 500. In particular, the controller 600 may interpret thedistance between the target and the sensor system 1000, the shape of theobject, and the like, using the numerical information provided by thereceiver 500.

In some example embodiments, the sensor system 1000 may be included inone or more portions of a vehicle, including an automobile. A vehiclemay include a vehicle that is configured to be driven (“navigated”)manually (e.g., based on manual interaction with one or more drivinginstruments of the vehicle by at least one occupant of the vehicle), avehicle that is configured to be driven (“navigated”) autonomously(e.g., an autonomous vehicle configured to be driven based on at leastpartial computer system control of the vehicle with or without inputfrom vehicle occupant(s)), some combination thereof, or the like. Forexample, in some example embodiments, the vehicle may be configured tobe driven (“navigated”) through an environment based on generation ofdata by one or more sensor systems 1000 included in the vehicle. Suchnavigation may include the vehicle being configured to navigate throughan environment, in relation to an object located in the environment,based on data generated by the sensor system 1000 (e.g., the receiver500) as a result of the sensor system 1000 (e.g., optical beam steeringdevice 100) emitting a light beam (e.g., a laser beam) into theenvironment and detecting the object in the environment, where thesensor system 1000 may detect the object based on detecting a reflectionand/or scattering of the emitted light beam off of the object.

In some example embodiments, based on the sensor system 1000 providingimproved reliability, improved accuracy, improved compactness, andreduced cost, the sensor system 1000 may enable a vehicle to beconfigured to implement autonomous navigation of an environment, viaincorporation of a sensor system 1000 that includes at least the opticalbeam steering device 100, with improved reliability, reduced cost, andreduced space requirements within the vehicle to incorporate the sensorsystem 1000 that may enable environment monitoring to further enableautonomous navigation through the environment.

In some example embodiments, the sensor system 1000 omits movingmechanical elements, at least partially based on including the tunablelaser diode 110 and the antenna 140 as described herein. Accordingly,the sensor system 1000 may have improved compactness, reliability, andperformance in relation to sensor systems including mechanical elements.

FIG. 10 is an example semiconductor system to which the optical beamsteering device and the sensor system according to some exampleembodiments of the present disclosure can be applied.

Referring to FIG. 10, a smartphone 1500 which is an examplesemiconductor system including an optical beam steering device accordingto some example embodiments of the present disclosure is illustrated.The smartphone 1500 may include the optical beam steering device 100 andthe receiver 500. The smartphone 1500 irradiates a user with laser beamusing the optical beam steering device 100, and the receiver 500receives the laser beam reflected from the user, thereby scanning theuser.

Example embodiments of the present disclosure have been described withreference to the attached drawings, but it may be understood by one ofordinary skill in the art that the present disclosure may be performedone of ordinary skill in the art in other specific forms withoutchanging the technical concept or essential features of the presentdisclosure. Further, the above-described embodiments are merely examplesand do not limit the scope of the rights of the present disclosure.

1. An optical beam steering device, comprising: a tunable laser diodeconfigured to emit laser beams, the emitting including emitting a firstlaser beam having a first wavelength, and emitting a second laser beamhaving a second wavelength, the second wavelength different from thefirst wavelength; and an antenna including a grating structure, theantenna configured to convert the laser beams emitted by the tunablelaser diode to a linear light source based on the grating structure, theconverting including receiving the first laser beam and, in response,outputting a first linear light source having a first emission anglewith a surface of the antenna, and receiving the second laser beam and,in response, outputting a second linear light source having a secondemission angle with the surface of the antenna, the second emissionangle different from the first emission angle.
 2. The optical beamsteering device of claim 1, wherein the tunable laser diode isconfigured to continuously change a wavelength of the laser beamsemitted by the tunable laser diode between the first wavelength and thesecond wavelength, such that the tunable laser diode is configured tocontinuously change between emitting the first laser beam and emittingthe second laser beam, and the antenna is configured to continuouslychange emission angles of the linear light source between the firstemission angle and the second emission angle.
 3. The optical beamsteering device of claim 2, wherein the antenna is configured to scan atarget within a range between the first emission angle and the secondemission angle.
 4. The optical beam steering device of claim 1, whereinthe surface of the antenna extends in a first direction, and the linearlight source extends in a second direction substantially orthogonal tothe first direction.
 5. The optical beam steering device of claim 4,wherein the tunable laser diode and the antenna are collectivelyconfigured to cause the linear light source to move between the firstemission angle and the second emission angle along the first direction.6. The optical beam steering device of claim 4, wherein the firstdirection is a horizontal direction and the second direction is avertical direction.
 7. The optical beam steering device of claim 1,further comprising: an optical amplifier configured to amplify lightemitted by the tunable laser diode.
 8. The optical beam steering deviceof claim 7, further comprising: a bandpass filter configured to filterlight amplified by the optical amplifier, the bandpass filter furtherconfigured to provide the filtered light to the antenna.
 9. An opticalbeam steering device, comprising: a tunable laser diode configured toemit laser beams, the emitting including emitting a first laser beamhaving a first wavelength, and emitting a second laser beam having asecond wavelength, the second wavelength different from the firstwavelength; first and second optical amplifiers configured to amplifythe first and second laser beams emitted by the tunable laser diode,respectively; first and second bandpass filters configured to filter thefirst and second laser beams amplified by the first and second opticalamplifiers, respectively; a first antenna extending in a firstdirection, the first antenna configured to convert the filtered firstlaser beam to a linear light source extending in a second direction thatis substantially orthogonal to the first direction, such that the linearlight source extending in the second direction has a first emissionangle with a surface of the first antenna; and a second antennaextending in the second direction, the second antenna configured toconvert the filtered second laser beam to a linear light sourceextending in the first direction, such that the linear light sourceextending in the first direction has a second emission angle with asurface of the second antenna, the second emission angle different fromthe first emission angle.
 10. The optical beam steering device of claim9, wherein the tunable laser diode is configured to continuously changea wavelength of the laser beams emitted by the tunable laser diodebetween the first wavelength and the second wavelength, such that thetunable laser diode is configured to continuously change betweenemitting the first laser beam and emitting the second laser beam, andthe first antenna is configured to continuously change emission anglesof the linear light source extending in the second direction between thefirst emission angle and the second emission angle.
 11. The optical beamsteering device of claim 10, wherein the first antenna is configured toscan a target within a range between the first emission angle and thesecond emission angle.
 12. The optical beam steering device of claim 9,wherein the optical beam steering device is configured to control atleast one of the first antenna and the second antenna to selectivelyoutput the linear light source extending in the second direction or thelinear light source extending in the first direction.
 13. An opticalbeam steering device, comprising: a tunable laser diode configured toemit a laser beam; a first antenna including a plurality of firstgratings spaced apart from each other by a first distance, the firstantenna configured to convert the laser beam to a linear light sourcehaving a first emission angle with a surface of the first antennathrough the plurality of first gratings; and a second antenna includinga plurality of second gratings spaced apart from each other by a seconddistance different from the first distance, the second antennaconfigured to convert the laser beam to a linear light source having asecond emission angle with a surface of the second antenna through theplurality of second gratings.
 14. The optical beam steering device ofclaim 13, wherein the tunable laser diode is configured to emit a firstlaser beam having a first wavelength and a second laser beam having asecond wavelength different from the first wavelength, the first antennais configured to receive the first laser beam and, in response, outputthe linear light source having the first emission angle, and the firstantenna is further configured to receive the second laser beam and, inresponse, output a linear light source having a third emission anglewith the surface of the first antenna, the third emission angledifferent from the first emission angle.
 15. The optical beam steeringdevice of claim 14, wherein the second antenna is configured to receivethe first laser beam and, in response, output the linear light sourcehaving the second emission angle, and the second antenna is furtherconfigured to receive the second laser beam and, in response, outputs alinear light source having a fourth emission angle with the surface ofthe second antenna, the fourth emission angle different from the secondemission angle.
 16. The optical beam steering device of claim 14,wherein the tunable laser diode is configured to continuously change awavelength of the laser beam emitted by the tunable laser diode betweenthe first wavelength and the second wavelength, such that the tunablelaser diode is configured to continuously change between emitting thefirst laser beam and emitting the second laser beam, and the firstantenna is configured to continuously change emission angles of thelinear light source output by the first antenna between the firstemission angle and the third emission angle.
 17. The optical beamsteering device of claim 16, wherein the second antenna is configured tocontinuously change emission angles of the linear light source output bythe second antenna between the second emission angle and a fourthemission angle, the fourth emission angle different from the secondemission angle.
 18. The optical beam steering device of claim 13,further comprising: an optical amplifier configured to amplifies thelaser beam emitted by the tunable laser diode.
 19. The optical beamsteering device of claim 18, further comprising: a first bandpass filterconfigured to filter the laser beam amplified by the optical amplifierand provide the laser beam filtered by the first bandpass filter to thefirst antenna; and a second bandpass filter configured to filter thelaser beams amplified by the optical amplifier and provides the laserbeam filtered by the second bandpass filter to the second antenna. 20.The optical beam steering device of claim 13, wherein the first antennaextends in a first direction, and the linear light source which isoutput from the first antenna extends in a second directionsubstantially orthogonal to the first direction. 21.-23. (canceled)